메뉴 건너뛰기

반도체 & 디스플레이

Semiconductor & Display


LK Systems 에서 제작한 대표적인 제품군을 소개합니다.



 

 

2_2_5.gif


"T"社 열처리 장비


Applications:
     - Doped Polysilicon(P, C doped Polysilicon)
     - Nitride (Si3N4)
     - LPTEOS, Oxide
     - Radical Oxide
     - ALD Oxide


Equipment Assembly by LK Systems.


463535_20130809142155_327_0001.jpg



"A"社 Sputter System

 

Information: Diameter 300mm including EMC

(Epoxy Molding Compound)

EFEM, 2LoadLock, Octagonal Transfer Chamber,

2Multi_Degas Chamber

2Pre-Cleaning Chamber (CCP)

2Process Module


Electric Drawing & Assembly by LK Systems.




 

untitled.png


 

"A"社 RTP System

 

EFEM, 2LoadLock,Transfer Chamber,

2Process Module


Electric & Equipment Assembly by LK Systems.

 

 

 

 

 

 

 

 

 

 

 

 



위로